Characterization in Silicon Processing (BOK)

Yale E. Strausser

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With a focus on the use of materials characterization techniques for silicon-based semiconductors, this volume in the "Materials Characterization" series focuses on the process flow of silicon wafer manufacture where materials properties, processing and associated problems are brought to the fore. The book is organized by the types of materials commonly associated with integrated silicon semiconductor circuits and the typical processes involved for each such material, including deposition, thermal treatment, and lithography. Readers will find features such as: the essential processes of Silicon Epitaxial Growth; coverage of Polysilicon Conductors, Silicides, Aluminum and Copper-based Conductors, Tungsten-based Conductors; and concise summaries of major characterization technologies for silicon and related semiconductor materials, including Auger Electron Spectroscopy, Energy-Dispersive X-Ray Spectroscopy, Neutron Activation Analysis and Raman Spectroscopy.


Språk Engelsk Engelsk Innbinding Innbundet
Utgitt 2010 Forfatter Yale E. Strausser
Momentum Press
ISBN 9781606501092
Antall sider 240 Dimensjoner 15,7cm x 24,1cm x 1,6cm
Vekt 522 gram Leverandør Bertram Trading Ltd
Emner og form Materials science