Semiconductor Process Reliability in Practice (BOK)

Zhenghao Gan, Waisum Wong, Juin J. Liou

999,00 99900
Sendes vanligvis innen 5-15 dager
Proven processes for ensuring semiconductor device reliability Co-written by experts in the field, Semiconductor Process Reliability in Practice contains detailed descriptions and analyses of reliability and qualification for semiconductor device manufacturing and discusses the underlying physics and theory. The book covers initial specification definition, test structure design, analysis of test structure data, and final qualification of the process. Real-world examples of test structure designs to qualify front-end-of-line devices and back-end-of-line interconnects are provided in this practical, comprehensive guide. Coverage includes: Basic device physics Process flow for MOS manufacturing Measurements useful for device reliability characterization Hot carrier injection Gate-oxide integrity (GOI) and time-dependentdielectric breakdown (TDDB) Negative bias temperature instability Plasma-induced damage Electrostatic discharge protection of integrated circuits Electromigration Stress migration Intermetal dielectric breakdown


Språk Engelsk Engelsk Innbinding Innbundet
Utgitt 2012 Forfatter Juin J. Liou, Waisum Wong, Zhenghao Gan
MCGRAW-HILL Professional
ISBN 9780071754279
Antall sider 624 Dimensjoner 16,2cm x 23,6cm x 3,8cm
Vekt 986 gram Leverandør Bertram Trading Ltd
Emner og form Electrical engineering